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Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications Kamaljeet Singh, Ayan Karmakar ebook
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- ISBN: 9789819661626
- Publisher: Springer-Verlag New York, LLC
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Overview This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor,...